JPH0438449B2 - - Google Patents

Info

Publication number
JPH0438449B2
JPH0438449B2 JP58088235A JP8823583A JPH0438449B2 JP H0438449 B2 JPH0438449 B2 JP H0438449B2 JP 58088235 A JP58088235 A JP 58088235A JP 8823583 A JP8823583 A JP 8823583A JP H0438449 B2 JPH0438449 B2 JP H0438449B2
Authority
JP
Japan
Prior art keywords
gas
drum
electrode plate
glow discharge
circumferential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58088235A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59213439A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8823583A priority Critical patent/JPS59213439A/ja
Publication of JPS59213439A publication Critical patent/JPS59213439A/ja
Publication of JPH0438449B2 publication Critical patent/JPH0438449B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
JP8823583A 1983-05-18 1983-05-18 容量結合型グロ−放電分解装置 Granted JPS59213439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8823583A JPS59213439A (ja) 1983-05-18 1983-05-18 容量結合型グロ−放電分解装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8823583A JPS59213439A (ja) 1983-05-18 1983-05-18 容量結合型グロ−放電分解装置

Publications (2)

Publication Number Publication Date
JPS59213439A JPS59213439A (ja) 1984-12-03
JPH0438449B2 true JPH0438449B2 (en]) 1992-06-24

Family

ID=13937196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8823583A Granted JPS59213439A (ja) 1983-05-18 1983-05-18 容量結合型グロ−放電分解装置

Country Status (1)

Country Link
JP (1) JPS59213439A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011242424A (ja) * 2010-05-14 2011-12-01 Canon Inc 電子写真感光体の製造装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3684011B2 (ja) * 1996-12-12 2005-08-17 キヤノン株式会社 プラズマｃｖｄ法による堆積膜形成方法及び装置
JP4680619B2 (ja) * 2005-02-09 2011-05-11 株式会社アルバック プラズマ成膜装置
JP2007293280A (ja) 2006-03-30 2007-11-08 Kyocera Corp 電子写真感光体およびこれを備えた画像形成装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925969A (ja) * 1982-08-04 1984-02-10 Minolta Camera Co Ltd グロ−放電分解装置
JPS5938375A (ja) * 1982-08-26 1984-03-02 Canon Inc プラズマｃｖｄ装置
JPS5950167A (ja) * 1982-09-13 1984-03-23 Toshiba Corp グロ−放電による薄膜形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011242424A (ja) * 2010-05-14 2011-12-01 Canon Inc 電子写真感光体の製造装置

Also Published As

Publication number Publication date
JPS59213439A (ja) 1984-12-03

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